1. Title : Material challenges in MEMS based mass data storage chip

2. Speaker : Dr. Rong Chen(Huazhong University of Science and Technology)

3. Date & Time : Apr 4th, PM5:00~6:00

4. Venue : Bldg.301, Rm.117

5. Abstract :

Flash memory chips are predicted to begin slowing down their bit density growth in the next few years due to lithography related constraints.  A new class of ultra-high-capacity storage system based on MEMS technology, the probe-based seek-and-scan memory is  an ideal candidate for future ultrahigh-density (>Tbit/inch2) nonvolatile memory devices.  It uses a nano-probe array technology, read and write every domain onto a continuous   ferroelectric media.  The domains are defined by the electrical contact area of the AFM    tip on the media, typically in 10~20 nm diameter today and going much smaller in the   future.  This technology will enable the storage of tens of gigabytes of data per chip, at  a substantially lower cost than today’s flash memory solutions, and can potentially go far beyond the expected limits of conventional lithography used in present semiconductor  memory chips.  However, the high-speed scanning operations over a device lifetime of   5 to 10 years, which corresponds to a probe-tip sliding distance of 5 to 10km, can cause the probe-tip to mechanically wear, critically affecting its write-read resolution.  In this    talk, we will show that atomically smooth ferroelectric films are a prerequisite for both   wear reduction and ultrahigh density recording.  We show that a platinum-iridium probe-tip retains its write-read resolution on such surfaces over 5 km of sliding at a 5 mm/s     velocity.  This tip-wear endurance is enabled by applying a low magnitude modulated     force at the tip-surface contact in the presence of a thin water layer.We also demonstrate a 3.6 Tbit/inch2 storage density over a 1×1 μm2 area, which is the highest density ever  written on ferroelectric films over such a large area.

6. Bio: Dr. Rong Chen received her doctoral and master degrees from Stanford University and bachelor degree from University of Science and Technology of China (USTC).She joined school of mechanical science and engineering, Huazhong University of Science and    Technology (HUST) in September, 2011.  Prior to that, she was a senior research scientist in Intel Labs, conducting research on novel devices for electronics and energy applications.  She was among the first batch of researchers awarded the young 1000 talent program -the Recruitment Program of Global Experts- granted by Organization Department of the CPC Central Committee, and the new century talents in universities support.

※ Contact : Prof. Kahp-Yang Suh (880-9103)